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Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Koike, Masato; Kawachi, Tetsuya; Imazono, Takashi; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; et al.
Nihon Denshi Nyusu, 44, p.11 - 16, 2012/00
A new WDS spectrometer for a transmission electron microscope has been constructed. This spectrometer can cover an energy region from 50 eV to 3800 eV by using four aberration-corrected gratings for flat-field optics. By using a newly designed and manufactured grating of JS50XL for 50-200 eV, soft-X-ray emission spectra of simple metals of Mg, Li, Al and Be were measured. Those intensity profiles correspond to partial density of states of valence electrons (bonding electrons) and also showed clear Fermi edges (top of the occupied state). At the Fermi edge of Mg-L emission (49.5 eV), an energy resolution was evaluated to be 0.16 eV. Si-L emission spectra of Si and TiSi
show a difference in those intensity distributions, indicating different valence-electron states for those materials. A comparison of B-K emission spectra of CaB
and LaB, which were obtained by using another grating of JS200N, is shown.
Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Terauchi, Masami*; Koike, Masato; Kawachi, Tetsuya; Imazono, Takashi; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; et al.
Nihon Denshi Nyusu, 44, p.50 - 54, 2012/00
The soft-X-rays spectroscope developed for transmission electron micro scopes (TEM) so far was carried in the electron probe microanalyzer (EPMA). A combination of a newly developed varied-line-spacing (VLS) diffraction grating of JS50XL, and back-illumination type CCD is capable to observe a spectrum simultaneously in an energy region from 50 to 170 eV. In Al-L emission of an aluminum metal, 0.2 eV or less of high energy resolution was obtained. A clear Fermi edge and electronic density of states could be also observed, and the analysis of state in the minute domain became possible. For boron analysis, a VLS diffraction grating of JS200N (energy range: 70-210 eV) was produced, and super-light element analysis in steel of a 10 ppm level also became possible with the analytical curve determination method.
Nihon Denshi Nyusu, 27(1-2), p.12 - 17, 1987/02
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